Wi8i : Wafer Vision Inspection Handler


Wi8i Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer range from 100mm (4”) to 300mm (12”).
Wi8i Wafer Vision Inspection Handler
Model Type Wi8i
Wafer Input Type & Size
100mm (4”) Raw Wafer
150mm (6”) Raw Wafer
200mm (8”) Raw Wafer
300mm (12”) Framed Wafer
100mm (4”) Hoop Ring
150mm (6”) Hoop Ring
200mm (8”) Hoop Ring
300mm (12”) Hoop Ring
100mm (4”) Framed Wafer
150mm (6”) Framed Wafer
200mm (8”) Framed Wafer
300mm (12”) Framed Wafer
Camera Lens
2X 5X 7.5X
Accuracy
2.2 μm / pixel 0.9 μm / pixel 0.6 μm / pixel
Field of View
9.1mm x 9.1mm 3.6mm x 3.6mm 2.4mm x 2.4mm
System Capability
XY Theta Stage Travel Distance Offline Reclassify System Wafer Automated Loading-Unloading Handler
X : 400mm
Y : 400mm
θ : -170° to 170°
Maximize Wi8i inspection throughput while wafer defect verifier performs offline inspection. It’s able to identify, review and resolve yield issues. Auto handling supports up to 200mm (8”) raw wafer, hoop ring and framed wafer.

Specifications are subject to change.