Wi8 i G2 : Wafer Vision Inspection Handler


Wi8 i G2 Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer range from 100mm (4”) to 300mm (12”).
Wi8i Wafer Vision Inspection Handler
Model Type Wi8 i G2
Wafer Input Type & Size
Raw Wafer - 4” (100mm) , 6” (150mm) , 8” (200mm) , 12” (300mm)

Hoop Ring - 4” (100mm) , 6” (150mm) , 8” (200mm) , 12” (300mm)

Framed Wafer - 4” (100mm) , 6” (150mm) , 8” (200mm) , 12” (300mm)
Camera Lens
2X 5X 7.5X
Accuracy
2.2 μm / pixel 0.9 μm / pixel 0.6 μm / pixel
Field of View
9.1mm x 9.1mm 3.6mm x 3.6mm 2.4mm x 2.4mm
System Capability
XY Theta Stage Travel Distance Offline Verifier Wafer Automated Loading-Unloading Handler
X : 350mm
Y : 350mm
θ : -170° to 170°
Optimize production yield.
Once wafer inspection is completed, user can Identify, Review and Reclassify inspection result with Offline Verifier.
Auto handling supports up to 200mm (8”) raw wafer, hoop ring and framed wafer.

Specifications are subject to change.