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WiX Ai : Smart Wafer AOI Machine


WiX Ai, Smart Wafer AOI Machine is an all-in-one platform delivers sub-micron accuracy for total defect control across front, inner and back surfaces. Designed for scalability and versatility, it helps Foundries, IDMs, and OSATs achieve superior yield and reliability. With AI-driven capabilities, it’s ready to handle evolving requirements and next-generation defect challenges.
Wi8i Wafer Vision Inspection Handler
Model Type WiX Ai Series
Wafer Input Type & Size
Raw Wafer: 150mm , 200mm , 300mm

Framed Wafer: 150mm , 200mm , 300mm

*Hoop Ring: Supportable
Wafer Carrier Type & Size Raw Wafer Cassette: 150mm , 200mm
FOUP / FOSB: 300mm (raw wafers)
Framed Wafer Cassette: 150mm , 200mm , 300mm
Vision Optics High Resolution Industrial Camera, High Accuracy Magnification Lens, Intelligent Autofocus, Multiple Illumination, Multiple Colour Filter
Magnification Lens
2X 5X 7.5X 10X
Automated Handling Mechanism Automated Wafer Handling & Inspection with

- Dual Robot Arm
- Dual Load Port
Smallest Accuracy 0.7 µm / pixel
Cleanroom Class

Class 100, Class 1000

With Ionizer and ULPA/HEPA Filter System
Lot & Wafer ID Traceability

External and Built-in Barcode Scanner: 1D, 2D Carcodes
Built-in OCR Scanner: Alphanumeric Codes

*Only manual loading available | Specifications are subject to change.